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AGV
Intelligent automation
New energy technologies

New energy technologies

Off-line automatic diffusion loading and unloading machine


规格参数

  Single/polycrystalline/black siliconCompatibility
  Overall dimensions156.75*156.75±0.5；166*166±0.5；210*210±0.5
  Thickness（mm）0.15-0.22
 Operating capacity≥4000 tablets/hour
 Uptime99%
 MTBFMTBF≥400h
 MTTRMTTR≤0.5h
 Debris rate≤0.06%(mortar A piece; Quartz boat deformation, large work difference, etc.)
 Power supplyAC220V one-phase 50HZ
 Power8
 Compressed air≥ 0.6mpa diameter of main air pipeline ≥ 20 connect the air pipe connector 12
 Compressed air flow18L/min
  Accessories0-35℃/40%-60%
  CleanlinessComply with the relevant specification requirements of 100,000 clean areas
  Noise≤60dB
  Machine weight (kg)about1300
  Overall size (mm)3500*1500*1750



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